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最近,在制造IC、LSI等半导体元件的精密定位领域中,使用商品化的X-Y工作台的例子正在多起来。大多数这类商品的定位精度为5～10μm。然而,随着半导体元件向高集成化方向急剧地发展,人们对X-Y工作台定位精度的要求也越来越高。因此,如何选择这类设备中X-Y工作台的规格与结构便成为一个重要的问题。在这里,我们首先谈一谈在选取X-Y工作台时应该怎样决定它的规格与结构以及怎样加以评价等方面的内容,然后再说一说应用X-Y工作台的两、三例有关的设备。
Recently, an example of using a commercially available X-Y stage has been developed in the field of precision positioning of semiconductor elements such as ICs and LSIs. Most of these goods positioning accuracy of 5 ~ 10μm. However, with the rapid development of highly integrated semiconductor devices, the positioning accuracy of the X-Y stage has become higher and higher. Therefore, how to choose the specifications and structure of X-Y workbench in such equipment has become an important issue. Here, let us first talk about how to determine the specifications and structure of the X-Y workbench and how to evaluate it. Then we will talk about two or three related equipment using the X-Y workbench.