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许多应用需要高束流,并且操作带有化学活性气体,这类应用影响了通常离子源中放电电极的寿命和工作要求。尽管研制了专门设计的热灯丝和空心阴极,处在放电区的这些电极仍然限制了离子源和等离子体源的实际用途。因此,研制一种有效的,简易的无电极放电在离子束和等离子体加工工艺中势必引起重要的进展。 最近,我们研制了一种无电极微波离子源和等离子体源。本文讨论了这种离子源的改进措施。这就是围绕放电区重新设计了许多紧密排列稀土磁铁。这些磁铁产生一个封闭的回旋共振多峰点静磁场。文中提供了这一“改良”离子源采用氩气的实验性能。并给出了在各种气体流量和工作压力下引出离子束流与加速电压、放电电子和离子密度等关系的实验测量结果。
Many applications require high beam currents and operate with chemically active gases that affect the life and operating requirements of the discharge electrodes in typical ion sources. Despite the development of specially designed hot filaments and hollow cathodes, these electrodes in the discharge zone still limit the practical use of the ion source and the plasma source. Therefore, developing an efficient and simple electrodeless discharge will inevitably lead to significant progress in ion beam and plasma processing. Recently, we developed an electrodeless microwave ion source and a plasma source. This article discusses improvements to this ion source. This is where many tightly aligned rare earth magnets have been redesigned around the discharge zone. These magnets produce a closed cyclotron resonance multi-peak point static magnetic field. The experimental performance of this “modified” ion source using argon is provided. The experimental results of the relationship between the extracted ion beam current and accelerating voltage, discharge electron and ion density at various gas flow rates and operating pressures are also given.