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本文叙述了超微粒子的基本概念及其性质,介绍了超微粒子气体敏感膜的制作方法和电特性,通过和一般半导体传感器的比较,指出了超微粒子传感器的优点。最后还给出了集成化超微粒子多功能传感器的结构模型和制作方法。
This paper describes the basic concepts and properties of ultrafine particles. The fabrication methods and electrical properties of ultrafine particles are introduced. The advantages of ultrafine particle sensors are pointed out by comparison with the general semiconductor sensors. Finally, the structural model and fabrication method of the integrated multi-function particle sensor are also given.