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采用双温度模型,对飞秒单脉冲激光照射下金膜的烧蚀过程进行了研究,通过界面能量平衡方程成核动力学方程和气体动力学定律对烧蚀过程中的固-液以及气-液界面进行了追踪。对考虑非傅里叶效应的双重双曲线两步(DHTS)模型和抛物线两步(PTS)模型的模拟结果进行了对比研究,并分析了激光和金属薄膜参数对烧蚀过程的影响。结果表明:对于飞秒激光烧蚀过程,DHTS模型的模拟结果比PTS模型的模拟结果更接近于实验数据,相同条件下DHTS模型得到的熔化以及烧蚀深度会明显高于PTS模型得到的结果;激光能量密度越大,激光脉冲宽度越小激光烧蚀的深度越深,而薄膜越厚烧蚀越弱。
The dual-temperature model was used to study the ablation process of the gold film irradiated by femtosecond single-pulse laser. The energy balance equation of the interface was used to study the ablation process of solid-liquid and gas- Liquid interface was followed. The double hyperbola two-step (DHTS) model and the parabolic two-step (PTS) model considering the non-Fourier effect were compared. The effects of laser and metal thin film parameters on the ablation process were analyzed. The results show that for the femtosecond laser ablation process, the simulation results of DHTS model are closer to the experimental data than that of PTS model. The melting and ablation depth obtained by DHTS model under the same conditions will be significantly higher than that of PTS model. The larger the laser energy density, the smaller the laser pulse width is, the deeper the laser ablation depth, and the thinner the film is, the weaker the ablation.