论文部分内容阅读
表面形貌干涉测量技术是一种高精度的非接触式测量技术,在工业生产和科学研究中具有广泛的应用。提出一种实时测量表面形貌的正弦相位调制干涉测量新技术。该技术用激光二极管作光源,用自制的高速图像传感器探测干涉信号,通过信号处理电路实时解相得到被测表面所对应的相位分布,实时分析相位获得物体表面形貌。该技术消除了光强和部分外界干扰的影响,提高了系统的测量精度。楔形光学平板表面形貌的测量结果表明,测量点为60×60个的情况下,测量时间小于8.2 ms,重复测量精度(RMS)为4.3 nm。
Surface topography interference measurement technology is a high-precision non-contact measurement technology, has a wide range of applications in industrial production and scientific research. A new technique of measuring sinusoidal phase modulation interferometry for surface real-time measurement is proposed. The laser diode technology is used as a light source to detect the interference signal by a self-made high-speed image sensor. The phase distribution corresponding to the measured surface is obtained by the signal processing circuit in real time, and the phase of the object surface is analyzed in real time. The technology eliminates the influence of light intensity and part of external interference and improves the measurement accuracy of the system. The measurement results of the surface morphology of the wedge-shaped optical flat panel show that the measurement time is less than 8.2 ms and the repetitive measurement accuracy (RMS) is 4.3 nm when the measuring point is 60 × 60.