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束流积分仪对给定输入电荷产生数字化的脉冲信号,可准确测量直流或者变化缓慢的脉冲电流的平均值。研制的离子束和电子束扫描束装置需要使用束流积分仪进行束流均匀性测量和束流累积剂量测量。因此,自行研制了满足实验要求的束流积分仪。束流积分仪原理图如图1所示,输入放大器A1选用斩波稳定正比放大器,它具有极低的输入偏压
The beam integrator produces a digitized pulse signal for a given input charge, which accurately measures the average of the dc or slow varying pulse currents. Developed ion beam and electron beam scanning beam device requires the use of beam integrator beam uniformity measurement and beam cumulative dose measurement. Therefore, we developed a beam integrator that meets the experimental requirements. Beam integrator schematic diagram shown in Figure 1, the input amplifier A1 chooses chopper stabilized proportional amplifier, it has a very low input bias