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用激光熔出-共振离子化质谱法测定纯铁中及高纯硅片表面的铬。测定含有1012原子/cm2Cr的信号强度表明本方法可测定低至109原子/cm2的样品,其空间分辨率为0.2mm,还可进行二维杂质元素分析。
Determination of Chromium in Pure Iron and High Purity Wafer by Laser Melting - Resonance Ionization Mass Spectrometry. Determination of the signal intensity of 1012 atoms / cm2Cr indicates that the method can measure samples down to 109 atoms / cm2 with a spatial resolution of 0.2 mm and also perform two-dimensional impurity elemental analysis.