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1994年,传感器取得了十分令人注目的进展,这一情况已在1994年IEDM的很多技术论文中反映出来.完全有理由相信,传感器的重要性将在未来的岁月中与日俱增,那么,电机工程师和设计师们在期待些什么呢?全世界参加IEDM会议的传感器研究人员认为,传感器的发展将会形成一股巨大的浪潮.例如,日本丰田研究开发中央实验室的研究人员正在研究新兴的硅微机械技术和用于汽车的传感器.论文6.1讨论了多晶硅牺牲层蚀刻技术的发展.这种蚀刻技术适用于互补金属氧化物半导体(CMOS)的工艺,具有许多显著的优点.例如,它可用氧化硅、氮化硅作
In 1994, the sensor made remarkable progress. This situation has been reflected in many IEDM technical papers in 1994. There is every reason to believe that the importance of the sensor will increase in the coming years. Then, the electrical engineer And what are designers looking forward to? Sensor researchers at the IEDM conference worldwide believe that the development of sensors will form a huge wave. For example, researchers at the Toyota Research and Development Central Laboratory are studying emerging silicon. Micromachine technology and sensors for automotive applications. Thesis 6.1 discusses the development of polysilicon sacrificial layer etching techniques. This etching technique is applicable to complementary metal oxide semiconductor (CMOS) processes and has many significant advantages. For example, it can be used for oxidation. Silicon, silicon nitride