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随着精密加工技术在尖端科技领域的广泛应用,研究新型的微细加工微进给装置,是实现高精度微细加工的关键。本研究在基于GMM微进给刀架磁机耦合理论的基础上,进行基于GMM微进给刀架设计,并采用有限元方法对微进给刀架的磁机耦合特性进行分析,研究结果表明基于GMM微进给刀架满足亚微米级的微细加工精度。
With the extensive application of precision machining technology in cutting-edge science and technology, researching the new micro-machining micro-feeding device is the key to achieve high-precision micro-machining. In this paper, based on GMM micro-feed turret magnetic machine coupling theory, based on the GMM micro-feed turret design, and the use of finite element method of micro-feed turret magnetic machine coupling characteristics of the analysis showed that Based on the GMM micro feed turret to meet the sub-micron micron precision.