双光路自动制版机——图形发生器

• 机 构: 七机部七七一所
• 出 处: 半导体技术
• 发表日期: 1976年03期
• 关键词: 制版机 图形发生器 光孔 图形 大规模集成电路 小型电子计算机 掩模 工作台 图形的 坐标数据

本文叙述一台主要为发展大规模集成电路而研制的自动制版机,它兼有可变光孔台和固定图形台两种作图机构,用可变光孔台基本上可拼出掩模原图的所有图形,但对于较复杂而又大量重复的部分用固定图形台来制作则可提高作图效率。控制部分的中心是一台小型电子计算机。在输入掩模原图的基本数据之后,通过程序的处理,自动地完成图形的制作。

This paper describes a mainly for the development of large-scale integrated circuits and the development of automatic plate-making machine, which has both variable optical bench and fixed graphics Taiwan two mapping agencies, with variable optical bench can basically spell mask original Figure all the graphics, but for more complex and a large number of repetitive parts with a fixed graphics Taiwan to make the drawing efficiency can be improved. The center of the control section is a small computer. After the basic data of the mask is input, the graphics are automatically created through the processing of the program.