论文部分内容阅读
对光化反应/光散射装置检测易挥发性氢化物进行了研究。本法基于以光化反应生成颗粒(质点),再用光散射法对颗粒进行检测。以磷烷为例,导入185nm汞灯光线耦合进行光氧化反应,最后生成磷酸,其质点的直径大都为0.5μm以下。磷烷的浓度以测量被质点散射的He—Ne激光强度来确定。其最小的检测浓度分别是2ppmv(磷烷)和5ppmv(砷烷)。应用时,这种测量装置要经过一个液氮冷阱,再连接到氢化物的发生装置上。其最小检测量如下:P,0.4ng;As,1.5ng;Sb,2ng;Se,3ng及Sn,2ng。本方法的优点是灵敏度高,成本低,应答快,以及可能实现自动化操作。
The photochemical reaction / light scattering device for the detection of volatile hydride was studied. This method is based on the photochemical reaction of particles (particles), and then the light scattering method for the detection of particles. Phosphine as an example, the introduction of 185nm mercury lamp light coupling photooxidation reaction, the final generation of phosphoric acid, the particle size of most of the diameter of 0.5μm or less. The concentration of phosphine was determined by measuring the He-Ne laser intensity scattered by the particle. The minimum detectable concentrations are 2 ppmv (phosphine) and 5 ppmv (arsine), respectively. In use, the measuring device goes through a liquid nitrogen cold trap and is connected to a hydride generator. The minimum detection volume is as follows: P, 0.4ng; As, 1.5ng; Sb, 2ng; Se, 3ng and Sn, 2ng. The advantages of this method are high sensitivity, low cost, fast response, and possible automation.