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要加工出良好的光学零件平面,必须在加工过程中同时对其进行测量和检验。评定高精度的(平面偏差<λ/10)、直径较大的(>200mm)平面的测量和检验工作可采用所熟悉的方法进行。但是这就需要一定的工作条件,而实现这些条件却又需要在辅助工序或评定时间上化费很大精力。因此对光学工厂的实际工作者来说,能够有一种检验装出,比较简单、可靠地去测量高精度光学平面的平面性是十分重要的。根据这一要求提出的任务,设计制造了一种基于干涉法作为测量原理的装置。众所周知,应用干涉法检验时,将标准检测平晶按放在被测零件之上,根据这时出现的干涉条纹的变化,就能决定相应的平面性的质
To produce a good optical component plane, it must be measured and tested at the same time in the process. The measurement and verification of high-precision (plane deviation <λ / 10) and larger diameter (> 200 mm) planes can be performed using well-known methods. However, this requires some working conditions, and the realization of these conditions requires a great deal of effort in the auxiliary process or in the timing of the assessment. Therefore, it is very important for optical workers in the field to have a test fixture that can measure the planarity of a high-precision optical plane relatively simply and reliably. According to the task proposed by this requirement, a device based on the interferometry method as the measuring principle was designed and manufactured. As we all know, the application of interference test, the standard test flat crystal press on the measured parts, according to the occurrence of interference fringes change, you can determine the appropriate flatness of the quality