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本文介绍我们研制的磁悬浮真空计初步试验结果。简述该计的组成与利用数字频率计测量压强的方法。给出与中国计量科学研究院真空室的薄膜真空计对比,与DL-2型热阴极电离计对比及密封管静态压强测量稳定性的试验结果。试验的结果表明: ①多次对比的试验有较好的重复性。②在1×10~(-2)～1×10~(-3)托压强范围内,磁悬规与薄膜真空计的读数基本一致,相对偏差小于1％。磁悬规压强测量线性上限为1×10~(-2)托。③在1×10~(-3)～1×10~(-5)托压强范围内,DL-2型热阴极电离计与磁悬规的读数的相对偏差在+5％～-10％之间。在6×10~(-4)托压强附近,三天内多次对比的重复性较好。两个规的压强读数比值的相对标准差为1.3×10~(-2)。④密封管内静态压强的测量,平均压强P=2.555×10~(-3)托时,相对标准差为4.3×10~(-3);平均压强P=6.479×10~(-5)。托时,相对标准差为1.1×10~(-2)。
This article introduces the preliminary test results of our developed magnetic levitation vacuum gauge. A brief description of the composition of the meter and the use of digital frequency meter to measure pressure. The experimental results of the comparison with the DL-2 hot cathode ionization gauge and the stability test of the static pressure of the sealed tube are given in comparison with the film vacuum gauge of the vacuum chamber of China National Institute of Metrology. The test results show that: ① repeated comparison of the test has good repeatability. ② Within the pressure range of 1 × 10 -2 ~ 1 × 10 -3 Torr, the readings of magnetic suspension gauge and film vacuum gauge are basically the same, the relative deviation is less than 1%. The linear upper limit of magnetic suspension pressure measurement is 1 × 10 ~ (-2) torr. ③ The relative deviation between the DL-2 hot cathode ionization gauge and the magnetic overhang gauge is between + 5% and -10% within the pressure range of 1 × 10 -3 to 1 × 10 -5 between. In the 6 × 10 ~ (-4) pressure near the care, repeated three days better than the repeatability. The relative standard deviation of the pressure readings of two gauges was 1.3 × 10 -2. ④ The static pressure in the sealed tube is measured. The average standard deviation is 4.3 × 10 ~ (-3) when the average pressure is 2.555 × 10 ~ (-3) Torr. The average pressure is 6.479 × 10 ~ (-5). Support, the relative standard deviation of 1.1 × 10 ~ (-2).