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利用压电陶瓷 PZT的正反压电效应 ,将 PZT薄膜同时作为驱动及传感材料 ,设计并制造了两种新颖的以 IC兼容技术制作在硅片上的压电薄膜微型陀螺。高质量的 PZT薄膜是在 Pt/ Ti/ Si O2 / Si基底上以溶胶 -凝胶技术铺设的。基于反压电效应 ,微型陀螺在其谐振频率上被输入的交流信号驱动 ,由其正压电效应 ,可检测到与转动角速度成正比的输出信号。文章分别介绍了两种微型陀螺的设计原理 ,详述了制作方法 ,并对制出的压电微型陀螺进行了检测 ,得到的结果与预测结果相符
PZT films are used as the driving and sensing materials at the same time by using the positive and negative piezoelectric effect of PZT piezoelectric ceramics. Two novel piezoelectric thin film micro-gyroscopes based on IC-compatible technology are designed and manufactured. High-quality PZT thin films are deposited on sol-gel technology on Pt / Ti / Si O2 / Si substrates. Based on the anti-piezoelectric effect, the micro-gyroscope is driven by the input AC signal at its resonant frequency. Due to its positive piezoelectric effect, an output signal proportional to the rotational angular velocity can be detected. In this paper, the design principle of two kinds of micro-gyroscopes are introduced respectively, and the fabrication methods are described in detail. The piezoelectric micro-gyroscopes manufactured are tested and the results are consistent with the prediction results