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用射频等离子体方法分解甲烷，在Ge片上制备了类金刚石碳（DLC）膜。该膜折射率在2左右，具有较好的增透作用。双面镀DLC膜系统的红外透射比，随膜厚不同，其极大值在3．8～10．6μm范围内，在10．6μm处红外透射比达94．5％、镀制在直径为100mmGe基片上的DLC／Ge／DLC膜系、在10．6μm处，膜片中心的红外透射比为93．9％，距中心不同距离的5个点的红外透射比为91．1％，该膜系具有非常好的均匀性和红外增透性。通过计算获得了DLC膜的光学吸收系数曲线，该膜在3．8μm附近吸收系数为10cm-1；在10．6μm处吸收系数为600cm-1，并对该吸收曲线进行了讨论。
The radio frequency plasma is used to decompose methane to form a diamond-like carbon (DLC) film on a Ge wafer. The film refractive index of about 2, with a better anti-reflection effect. The infrared transmission ratio of double-sided DLC coating system varies with the film thickness, the maximum value is in the range of 3.8 ~ 10.6μm, the infrared transmission ratio reaches 94.5% at 10.6μm, The DLC / Ge / DLC film on 100mmGe substrate showed an infrared transmittance of 93.9% at the center of the film at 10.6μm and an infrared transmittance of 91.1% at 5 points at different distances from the center Membrane system has very good uniformity and infrared permeability. The optical absorption coefficient curve of the DLC film was obtained by calculation and the absorption coefficient was 10 cm-1 at 3.8 μm and that at 10.6 μm was 600 cm-1, and the absorption curve was discussed.