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本文介绍用乙炔一氧火焰沉积金刚石薄膜,在适当的工艺条件下得到的样品,经X射线分折确定为立方结构金刚石,经拉曼谱分析为不含石墨、不含无定型碳的纯金刚石多晶金刚石薄膜。本文还讨论了基底温度对沉积过程的影响,还对金刚石薄膜生长和合成机制进行了讨论。
In this paper, a sample of diamond film deposited by acetylene-oxygen flame is applied to the sample obtained under the proper process conditions. The sample is confirmed by X-ray diffraction as a cubic structure diamond. The Raman spectrum shows pure diamond without graphite and without amorphous carbon Polycrystalline diamond film. The article also discusses the effect of substrate temperature on the deposition process and discusses the mechanism of diamond film growth and synthesis.