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激光加工过程中常常伴随着等离子体现象的产生,因此对激光等离子体进行诊断有助于加深理解激光加工的物理机理。通过激光诱导击穿光谱法对激光等离子体的电子温度进行了理论和实验研究,并分别采用双线比较法、Boltzmann作图法和Saha-Boltzmann作图法对T2铜等离子体的电子温度进行了测量。实验结果表明,双线比较法由于仅采用两条谱线的信息进行计算,因此存在较大的误差。而Boltzmann作图法和Saha-Boltzmann作图法由于考虑了多条原子和离子谱线信息,计算的等离子体温度可靠性较高,适合于等离子体温度的测量。
Laser processing often accompanied by the plasma phenomenon, so the laser plasma diagnosis will help deepen understanding of the physical mechanism of laser processing. The electron temperature of laser plasma was studied theoretically and experimentally by laser-induced breakdown spectroscopy. The electron temperature of T2 copper plasma was measured by using two-wire comparison method, Boltzmann mapping method and Saha-Boltzmann mapping method respectively measuring. The experimental results show that the two-line comparison method has larger error because it only uses the information of two spectral lines to calculate. The Boltzmann plotting method and the Saha-Boltzmann plotting method take into account the information of multiple atomic and ion spectral lines, and the calculated plasma temperature has higher reliability and is suitable for the measurement of the plasma temperature.