Radiation-pressure-driven mechanical oscillations in silica microdisk resonators on chip

• 作 者: WANG GuanZhong ZHAO MingMing M
• 机 构: NationalLaboratoryofSolidStateMicrostructuresandCollegeofEngineeringandAppliedSciences,DepartmentofP
• 出 处: 中国科学：物理学、力学、天文学英文版
• 发表日期: 2015年5期
• 关键词: 机械振荡 辐射压 谐振器 驱动 芯片 硅胶 机械品质因素 二氧化硅 microcavity optomechanics oscillators
• 基金项目: This work was supported by the National Basic Research Program of China （Grant Nos. 2012CB921804 and 2011CBA00205）, and the National Natural Science Foundation of China （Grant Nos. 61435007, 11104137

We demonstrate radiation-pressure-driven mechanical oscillations from high optical quality factor silica microdisk resonators on chip. Mechanical quality factors of 3520 in air and 12540 in vacuum for the fundamental radial breathing modes are obtained fr