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(SIMS) 当固体表面被用初生离子在千伏范围冲击后称为可以发光的二次离子,这种二次离子的组成是被冲击表面及其化学组成的允许一个测定值的特征。例如一种被氧化物所复盖的金属表面产生的通常组成MemOn±(Me金属0-氧)的二次离子。一种固体在离子冲击期间,需控制表面发生的飞溅。用这种方法做薄层的深轮廓分析已经完成。 SIMS技术最重要的特征是: 可以观察化学化合物可以观察氢及其化合物
(SIMS) A solid surface is called a glittering secondary ion when it is impacted with primary ions in the kilovolt range. The secondary ion’s composition is a characteristic that allows a measured value of the impacted surface and its chemical composition. For example, a secondary ion of the general composition MemOn ± (Me-metal 0-Oxygen) produced from a metal surface covered by an oxide. A solid in the ion impact period, the need to control the surface of the spatter. Thin-layer profiling using this method has been completed. The most important feature of SIMS technology is that it can be observed that chemical compounds can observe hydrogen and its compounds