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调制器是光纤系统的重要器件。硅基微机械光调制技术使用常规硅平面工艺方法 ,制作较为简单 ,成本较低。同时 ,又具有高数据速率 (几Mb/s)和宽频带( 1 3μm～ 1 5 μm)性能 ,满足日益增长的波分复用 (WDM )全光网络发展的需要。讨论了有关硅基微机械式光调技术的基本原理和一些相关的制作方法 ,制作了多层膜光反射调制器样品
Modulators are important components of fiber optic systems. Silicon-based micro-mechanical light modulation technology using conventional silicon planar process, the production is relatively simple, low cost. At the same time, it has the performance of high data rate (several Mb / s) and broadband (1 3μm ~ 1 5 μm) to meet the needs of the ever increasing wavelength division multiplexing (WDM) all optical network. The basic principle of silicon-based micro-mechanical light-adjusting technology and some related fabrication methods are discussed. A sample of a multi-layer film light-reflecting modulator