Characterization of the arrangement feature of copper interconnects by Moire inversion method

• 作 者: QinghuaWang Satoshi Kishimoto
• 机 构: NationalInstituteforMaterialsScience,AML,SchoolofMaterialsScienceandEngineering
• 出 处: 力学快报：英文版
• 发表日期: 2012年2期
• 关键词: 反演方法 铜互连 莫尔 功能特性 聚焦离子束 纤维蛋白原 结构性缺陷 平面布置 copper interconnects arrangement Moire
• 基金项目: supported by the JSPS Postdoctoral Fellowship for Foreign Researchers,,the National Basic Research Program of China (“973” Project) (2010CB631005,2011CB606105),,the National Natural Science Foundation

This paper explores the planar arrangement feature of the copper interconnects in a view field of several millimeters by the focused ion-beam(FIB) Moir'e inversion method quantitatively.The curved FIB Moir'e patterns indicate that the copper inter