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本文将氧化物的表面基模型同离子敏场效应器件的运用条件结合起来,进行了综合的理论与实验分析,证实了绝缘层表面同溶液间的界面行为对器件的敏感特性的影响起了主导作用,同时也不能忽略半导体材料与绝缘层之间界面行为的影响。
In this paper, we combine the surface model of oxides with the operating conditions of ion-sensitive field-effect devices and conduct a comprehensive theoretical and experimental analysis to confirm that the influence of the interface behavior between the same surface of the insulating layer and the solution on the sensitive characteristics of the device dominates Role, but also can not ignore the influence of interface behavior between the semiconductor material and the insulating layer.