论文部分内容阅读
本文介绍了制备ZnO簿膜的各种技术,ZnO簿膜的性能及其应用。对ZnO簿膜的结构、电学和光学性能进行了综述。
In this paper, various techniques for preparing ZnO thin films, the properties of ZnO thin films and their applications are introduced. The structure, electrical and optical properties of ZnO film were reviewed.