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本文利用周期性网络模型计算了射频板条CO2激光器电极的纵向电压分布.探讨了并联谐振技术在板条器件中获得成功运用的原因.提出了利用并联谐振技术进一步提高电压分布均匀性的两个途径.
In this paper, the periodic network model was used to calculate the longitudinal voltage distribution of RF lath CO2 laser electrode. The reason why parallel resonant technology is successfully used in slab devices is discussed. Two ways to further improve the voltage distribution uniformity by using the parallel resonance technique are proposed.