Selective growth of diamond by hot filament CVD using patterned carbon film as mask

• 作 者: HE Zhoutong YANG Shumin LI Qin
• 机 构: ShanghaiInstituteofAppliedPhysics,GraduateSchoolofChineseAcademyofSciences
• 出 处: 核技术：英文版
• 发表日期: 2008年2期
• 关键词: 金刚石薄膜 选择性沉积物 灯丝 碳薄膜 Diamond film Selective deposition Hot filament CVD Carbon
• 基金项目: Supported by the Key Project of Chinese Academy of Sciences Knowledge Innovation Program （Grant No. KJCX3. SYW. N10）

<正>Selected-area deposition (SAD) of diamond films was achieved on silicon substrates with carbon film mask by hot filament chemical vapor deposition.Needle tip scraped lines were used to grow diamond films.Scanning electron microscope (SEM) investi