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讨论了扫描探针显微镜（ Ｓ Ｐ Ｍ） 作为一种显微工具的优势和不足。介绍了把 Ｓ Ｐ Ｍ 应用于超精密加工检测领域所要注意的问题，指出纳米级加工机理的研究将依赖于 Ｓ Ｐ Ｍ 的复合化及多功能化，只有实现了加工与检测的一体化才能正确评价加工方法及工艺参数的优化选择，从而引导超精密加工的发展
The advantages and disadvantages of scanning probe microscopy (SPM) as a microscopic tool are discussed. The problems that should be paid attention to when applying SPM in the field of ultraprecision machining are introduced. It is pointed out that the research of nanoscale machining mechanism will depend on the complexation and multifunctionalization of SPM. Only the integration of machining and testing can be realized correctly Evaluation of processing methods and optimization of process parameters to guide the development of ultra-precision machining