论文部分内容阅读
研讨了激光加工的物理特点，提出一种激光打孔过程的微机自动化监控方法，解决了金刚石打孔的高速在线三维监控问题，在金刚石上成功地打出了μm级特型孔。
The physical characteristics of laser processing are discussed. A computer-based automatic monitoring method of laser drilling is proposed. The high-speed on-line 3D monitoring of diamond drilling is solved. The micrometer-scale holes are successfully drilled on diamond.