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用Ｘ射线衍射、透射电镜、Ｒａｍａｎ光谱、Ｘ射线光电子谱等测量方法研究了用对向靶溅射法制备的Ｃｏ／Ｃ多层膜的结构热稳定性．退火Ｃｏ／Ｃ多层膜的结构变化包括周期膨胀、非晶Ｃｏ层结晶、掠入射反射率变化以及化合物的形成．４００℃退火，周期膨胀主要是由于非晶碳层的石墨化．Ｃｏ／Ｃ系统的相分离造成掠入射反射率增强，可解释为Ｃｏ／Ｃ系统的正的混合焓．５００℃退火，Ｃｏ层的结晶和集聚导致了周期的异常膨胀和反射率的降低．此时界面处形成了少量的碳化物．
The thermal stability of the Co / C multilayers prepared by the counter-target sputtering method was investigated by X-ray diffraction, transmission electron microscopy, Raman spectroscopy and X-ray photoelectron spectroscopy. The structural changes of annealed Co / C multilayers include cyclic expansion, crystallization of the amorphous Co layer, changes in grazing incidence reflectivity and formation of compounds. 400 ℃ annealing, cycle expansion is mainly due to the graphitization of amorphous carbon layer. The grazing incidence reflectivity increases due to the phase separation of the Co / C system, which can be explained by the positive mixing enthalpy of the Co / C system. Annealing at 500 ° C, the crystallization and agglomeration of the Co layer lead to abnormal cycle expansion and decrease in reflectivity. At this time the interface formed a small amount of carbide.