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本文从理论上分析了采用绝缘粘胶物质将半导体靶片和金属靶片固定在承托盘上给注入离子的剂量精度和重复性带来的不良影响,提出了克服这种不良影响的方法;在此基础上,进一步提出了离子注入绝缘体时测量剂量的正确方法。
In this paper, the adverse effects of the dose accuracy and repeatability of the implanted ions on the support tray by using the insulating viscous material to fix the semiconductor target and the metal target on the support tray are theoretically analyzed. A method to overcome this adverse effect is proposed. On this basis, the correct method of measuring dose when ion-implanted insulator is further proposed.