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扫描隧道显微镜（ＳＴＭ）分辨率极高，是微观研究的重要仪器；但由于其视场小，样品易受污染等原因，在某些研究工作中的应用受到了限制。扫描电子显微镜（ＳＥＭ）的最低放大倍数在十倍左右，视场可达２０ｍｍ２～３０ｍｍ２（如４ｍｍ×６ｍｍ），可以引导扫描隧道显微镜进入试样预期研究的区域；另外超高真空的扫描电镜的样品室可以为扫描隧道显微镜提供清洁的工作环境，减少样品的污染。超高真空扫描电镜与扫描隧道显微镜的结合，可以弥补扫描隧道显微镜的不足，同时也拓展了扫描电镜的应用领域。本文介绍了集扫描隧道显微镜和扫描电镜于一体的纳米结构可重入ＳＴＭ／ＳＥＭ超高真空多功能系统的基本原理、结构和性能情况。
The high resolution of scanning tunneling microscope (STM) is an important instrument in microscopic research. However, its application in some research work is limited due to its small field of view and contamination of samples. Scanning electron microscopy (SEM) at a minimum magnification of about 10 times, the field of view up to 20mm2 ~ 30mm2 (such as 4mm × 6mm), can guide the scanning tunneling microscope into the expected area of the sample; the other high-vacuum scanning electron microscopy The sample chamber provides a clean working environment for scanning tunneling microscopes and reduces sample contamination. The combination of ultra-high vacuum scanning electron microscopy and scanning tunneling microscopy can make up for the lack of scanning tunneling microscopy, but also expand the application of scanning electron microscopy. This paper introduces the basic principle, structure and performance of the nanostructured reusable STM / SEM ultra-high vacuum multi-functional system integrating scanning tunneling microscope and scanning electron microscope.