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The Mo-N surface modified layer on Ti6Al4V alloy was obtained by the plasma surface alloying technique. The structure and composition of the Mo-N modified Ti6Al4V alloy were investigated by X-ray diffraction (XRD) and glow discharge optical emission spectroscopy (GDOES). The Mo-N modified layer contains Mo-N coating on subsurface and diffusion layers between the subsurface and substrate. The X-ray diffraction analysis of the Mo-N modified Ti6Al4V alloy reveals that the outmost surface of the Mo-N modified Ti6Al4V alloy is composed of phase Mo2N (fcc) and Mo2N (tetr). The electrochemical corrosion performance of the Mo-N modified Ti6Al4V alloy in 0.5mol/L HCl solution was investigated and compared with that of Ti6Al4V alloy. The chemical corrosion performance of the Mo-N modified Ti6Al4V alloy in boiling 37% HCl solution was investigated and compared with that of Ti6Al4V alloy. Results indicate that self-corroding electric potentials and corrosion-rate of the Mo-N modified Ti6Al4V alloy are higher than that of Ti6Al4V alloy in 0.5mol/L HCl solution. The corrosion-rate of the Mo-N modified Ti6Al4V alloy is lower than that of Ti6Al4V alloy in boiling 37% HCl solution.