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薄膜压阻传感器具有很多优点,尤其是它省去了一般应变片的胶贴工艺,由此引起的一系列缺点也就随之消失。它的蠕变极小,是一种很有前途的高精度压力传感器。近年来由于薄膜技术发展的推动,使这种五十年代就提出的传感器得到了迅速发展。本文将介绍我们自1988年以来所做的一些工作及其初步结果。
Thin-film piezoresistive sensor has many advantages, in particular, it eliminates the need for the general strain gage affixing process, resulting in a series of shortcomings will disappear. Its creep is minimal and is a promising high-precision pressure sensor. In recent years due to the development of thin film technology to promote, so that the sensor proposed in the fifties has been rapid development. This article will introduce some of the work we have done since 1988 and its preliminary results.