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Ruth和Hirth用自己的模型计算了束流分布,但该分布只限于在正入射条件下使用。Svensson和Andersson用R＆H模型计算了斜入射下的分布,因用的是近似方法,只能计算衬底表面中心线上的束流值,且不能满意解释实验结果。本文也采用R＆H模型,但不附加近似假定,直接计算斜入射下整个衬底而上的束流分布,获得较满意的结果。
Ruth and Hirth used their own model to calculate the beam distribution, but the distribution is limited to use under normal incidence. Svensson and Andersson calculated the distribution under oblique incidence using the R & H model. Because of the approximate method, only the beam current values on the centerline of the substrate surface can be calculated, and the experimental results can not be satisfactorily explained. In this paper, the R & H model is also used, but without adding the approximate assumptions, the beam distribution on the entire substrate obliquely incident is directly calculated, and the satisfactory result is obtained.