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采用MEMS技术设计和制造了一种由梳齿驱动器驱动的新型交叉梳齿光栅,同时优化了该光栅的驱动器结构,着重分析了优化驱动器结构对光栅机械特性和光学传感特性的影响,优化后的光栅相对于未优化时具有更大的位移、更好的光学传感特性。基于PolyMUMPs工艺制作了梳齿驱动器驱动交叉梳齿光栅,并逐步分析了该光栅的加工步骤。结合有限元分析软件,对该MEMS光栅的机械特性进行了分析。分析结果表明,在85V下,该光栅驱动器的位移为2.7μm,而实际测量的位移为2.1μm。通过对该光栅驱动器结构进行优化,得到在同等电压下优化后的光栅驱动器位移较未优化时有显著提高,在85V时,优化后的MEMS光栅驱动器的位移为4.3μm。根据傅里叶光学理论计算得到,该光栅的传感灵敏度与驱动器位移成正比,经过计算得到优化后MEMS光栅的光学传感曲线更加陡峭,具有更好的传感特性。
A novel interleaved comb-tooth grating driven by a comb-tooth driver was designed and manufactured by using MEMS technology. The structure of the driver was optimized. The influence of the optimized driver structure on the mechanical and optical sensing characteristics of the grating was analyzed emphatically. After optimization Of the grating relative to the unoptimized with greater displacement, better optical sensing characteristics. Based on the PolyMUMPs technology, a comb-tooth driver is used to drive the crossed comb tooth grating, and the processing steps of the grating are analyzed step by step. Combined with the finite element analysis software, the mechanical properties of the MEMS grating were analyzed. The analysis results show that the displacement of the grating driver is 2.7 μm at 85V, whereas the actually measured displacement is 2.1 μm. By optimizing the structure of the raster driver, the optimized raster driver displacement at the same voltage is significantly improved compared with the unoptimized one. At 85V, the displacement of the optimized MEMS raster driver is 4.3μm. According to the Fourier optical theory, the sensing sensitivity of the grating is proportional to the displacement of the actuator. After calculation, the optical sensing curve of the optimized MEMS grating is steeper and has better sensing characteristics.