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采用磁控溅射方法制备了MoS_2薄膜与不同碳含量的MoS_2/a-C复合薄膜,利用XRD、SEM、Raman光谱仪、纳米压痕仪和CSM摩擦试验机等分析了复合薄膜的结构、力学和摩擦学性能.结果表明:MoS_2薄膜为疏松的柱状结构,MoS_2/a-C复合薄膜为无定形的致密结构,硬度较高.低湿环境下MoS_2薄膜与MoS_2/a-C复合薄膜的摩擦性能差别不明显;高湿环境下薄膜的摩擦系数和磨损率均有所升高,其中MoS_2薄膜与低碳含量的MoS_2/a-C复合薄膜氧化严重,而高碳含量的MoS_2/a-C复合薄膜的摩擦学性能稳定,对湿度交替变换的环境适应性更佳.这是由于碳元素掺杂改善复合薄膜的微观结构,提高复合薄膜的抗氧化性和力学性能.
The MoS_2 films and MoS_2 / aC films with different carbon contents were prepared by magnetron sputtering. The structure, mechanical properties and tribology of the films were analyzed by XRD, SEM, Raman spectroscopy, nanoindentation and CSM tribometer. The results show that the MoS_2 film has a loose columnar structure and the MoS_2 / aC composite film has an amorphous and dense structure with high hardness.The tribological properties of the MoS_2 film and the MoS_2 / aC film are not obvious under the low humidity environment.High humidity environment The friction coefficient and wear rate of the lower film are increased, of which MoS_2 film and low carbon content MoS_2 / aC composite film oxidation serious, while the high carbon content of MoS_2 / aC composite film tribological properties are stable, alternating humidity Of the environmental adaptability better, which is due to the carbon doping improve the microstructure of the composite film to improve the composite film oxidation resistance and mechanical properties.