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采用分布式微机械传输线结构实现了两位移相器 ,并且为了减小传输线负载电容和驱动电压首次提出了用共面波导传输线来驱动微机械桥的结构 (共面波导驱动结构 ) .结果显示驱动电压小于 2 0 V,2 0 GHz时两位移相器的相移为 0°/ 2 0 .1°/ 4 1.9°/ 6 8.2°,插入损耗为 - 1.2 d B.在 DC到 32 GHz的范围内相移具有良好的线性 ,插入损耗小于 - 1.8d B,反射损耗好于 - 11d B.实验结果表明了该结构在高介电常数衬底上制造低插损、宽带数字微机械射频移相器的潜力
A two-phase shifter is realized by distributed micromechanical transmission line structure, and the structure (coplanar waveguide driving structure) driven by coplanar waveguide transmission line is proposed for the first time in order to reduce the transmission line load capacitance and driving voltage. The results show that the driving voltage Below 20 V, the phase shifters of the two phase shifters are 0 ° / 2.0.1 ° / 4 1.9 ° / 6 8.2 ° at 20 GHz and the insertion loss is -1.2 dB B. In the range of DC to 32 GHz The phase shift has a good linearity, the insertion loss is less than - 1.8d B, and the reflection loss is better than - 11d B. The experimental results show that the structure can fabricate a low insertion loss and wideband digital micromachined radio frequency phase shifter on a high dielectric constant substrate potential