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本文介绍了一种新型超高真空辅助设备——低温水泵。用之和分子泵组合，可以获得１０－８Ｐａ的清洁超高真空。用在半导体集成电路生产过程中，可以使产品质量以及生产效率均得到改善和提高。抽气机理以及设计要点均在文中有所论述。
This article describes a new ultra-high vacuum auxiliary equipment - low temperature water pump. Use and molecular pump combination, you can get a clean ultra-high vacuum 10-8Pa. Used in the semiconductor integrated circuit manufacturing process, can make the product quality and production efficiency are improved and improved. Pumping mechanism and design points are discussed in the article.