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采用射频磁控溅射法在p型Si衬底上制备了不同膜厚的氧化锌中掺杂氧化铝(AZO)薄膜。测试了电阻率、结构性质、光透过率、单色光光子-电子转换效率(IPCE)和电池性能谱,研究了膜厚对电池光电转换性能的影响。结果表明,在适当的膜厚内,随着膜厚的增大,异质结对波长300～400 nm的光的光电转换效率逐渐增大,对400 nm以上波长段光的光电转换效率逐渐减小;而膜厚过薄或过厚会导致光电转换率降低;溅射时间为30 min的样品膜厚最适中,为153.0 nm,样品的电池开路电压为0.399 V,短路电流为361.5μA,最大功率为40.8μW。
Different thickness ZnO films doped with aluminum oxide (AZO) were prepared on p-type Si substrate by RF magnetron sputtering. The effects of film thickness on the photoelectric conversion performance of the cell were investigated by measuring the resistivity, the structural properties, the light transmittance, the monochromatic photon-electron conversion efficiency (IPCE) and the cell performance spectrum. The results show that with the increase of film thickness, the photoelectric conversion efficiency of heterojunction to light with wavelength of 300-400 nm increases gradually with the increase of film thickness, and the photoelectric conversion efficiency of light with wavelength longer than 400 nm gradually decreases The film thickness is too thin or too thick will lead to lower photoelectric conversion rate; the sputtering time of 30 min the sample thickness is the most appropriate, 153.0 nm, the sample battery open circuit voltage of 0.399 V, the short circuit current of 361.5 μA, the maximum power Is 40.8 μW.