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采用自组装单层膜(self-assembled monolayers,SAMs)技术在玻璃基板表面制备了十八烷基三氯硅烷(octadecyltrichlorosilane,OTS)-SAMs,将OTS-SAMs基体在光掩膜覆盖下用紫外光进行刻蚀,得到含有亲水性和疏水性区域的模板,利用液相沉积法在OTS-SAMs模板表面制备了铁酸铋(BiFeO3)图案化薄膜。通过接触角仪、原子力显微镜、X射线衍射、扫描电镜、X射线能谱仪等测试手段对OTS膜和BiFeO3薄膜进行表征。结果表明:以OTS为模板利用液相沉积法制备出边缘轮廓清晰、粗糙度较小,与基板结合力较强,条纹宽度为10～20μm的BiFeO3图案化薄膜。
Octadecyltrichlorosilane (OTS) -SAMs were prepared on the surface of glass substrates by using self-assembled monolayers (SAMs). The substrates of OTS-SAMs were coated with UV light Then, a template containing hydrophilic and hydrophobic regions was obtained. A bismuth ferrite (BiFeO3) patterned film was prepared on the surface of OTS-SAMs template by liquid-phase deposition. OTS and BiFeO3 films were characterized by means of contact angle measurement, atomic force microscopy, X-ray diffraction, scanning electron microscopy and X-ray energy dispersive spectroscopy. The results show that BiFeO3 patterned films with clear edge, smaller roughness and stronger bonding with the substrate with stripe width of 10 ~ 20μm are prepared by liquid phase deposition method using OTS as template.