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用Ｓｏｌ－Ｇｅｌ方法制备了三种ＳｉＯ２凝胶，并以此制造了多孔ＳｉＯ２厚膜湿度传感器。其电容量－湿度关系呈开关特性，转变点约在８５％ＲＨ。
Three kinds of SiO 2 gel were prepared by Sol-Gel method, and porous SiO 2 thick film humidity sensor was fabricated. The capacitance-humidity relationship showed the switching characteristics, the transition point of about 85% RH.