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一、引言 在工艺和器件模拟方面,已出现许多优秀的模拟器,如:SUPREM,SEDAN,MINIMOS,PISCES等,可用于指导IC的设计和生产。国内集成电路工厂迫切需要用计算机来实现工艺、器件的一体化模拟,以加快集成电路工业的发展。 本文将一些工艺与器件模拟器联为一体,对国内几种典型电路产品进行了全过程模拟,模拟结果确证了产品参数,对工艺流程提出了合理建议。
I. Introduction In the process and device simulation, there have been many excellent simulators, such as: SUPREM, SEDAN, MINIMOS, PISCES, etc., can be used to guide the design and production of IC. The domestic integrated circuit factory urgently needs the computer to realize the integrated simulation of the process and the device so as to speed up the development of the integrated circuit industry. In this paper, some of the processes and device simulator together, the domestic several typical circuit products were the whole process simulation, the simulation results confirm the product parameters, the process proposed a reasonable proposal.