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微加工技术正被人们用来加工满足光通信系统要求的各类器件。在采用自由空间光学原理的器件中,针对交换、滤波和可调式衰减等应用的器件需要能实现较大的直线或角偏移的执行器(Actuator)。虽然有人建议采用基于表面微机械加工方法的器件,但对很多应用来说,执行器很难实现足够的
Micromachining technology is being used to process a wide range of devices that meet the requirements of optical communication systems. In devices using free-space optics, devices for applications such as switching, filtering, and adjustable attenuation require actuators that can achieve large linear or angular offsets. Although it is proposed to use devices based on surface micromachining methods, it is difficult for an actuator to achieve sufficient