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本文介绍了在多自由度纳米定位中,作为表面编码器测量基准的正弦波栅格的复制方法.该栅格表面的形貌为空间正弦波,即沿x和y方向均为波长100μm,振幅100nm的正弦波.这种栅格表面的大小为几十微米至几百微米.在安装了快速刀具伺服机构的金刚石车床上,制成了铝基栅格表面.该加工系统的优点是能够以高精度形成被加工表面,但另一方面,由于是在大面积内形成微观表面,故加工时间较长.为了实现快速制作,进行了基于基表面的复制,栅格表面的复制采取了热模压制法,在高分子薄膜上进行了实验.
In this paper, a method of replicating a sine-wave grid as a reference for measuring surface encoders in multi-degree-of-freedom nanopositioning is presented. The morphology of the grid surface is a spatial sinusoidal waveform with a wavelength of 100 μm along the x and y directions, 100nm sine wave. The size of the grid surface is tens of microns to hundreds of microns .In the installation of a fast tool servo diamond lathe, aluminum grid surface is made. The processing system has the advantage of being able to On the other hand, due to the formation of a microscopic surface in a large area, the processing time is longer. In order to achieve rapid production, base surface-based copying is performed, and the surface of the grid is replicated by hot stamping Method, the polymer film on the experiment.