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针对平面光学零件,以抛光去除率和表面粗糙度为考核指标,应用正交试验法分析了气囊抛光过程中的主要工艺参数,包括抛光工具气囊的压缩量、气囊转速、气囊内部充气压力、抛光液的浓度对抛光去除效率和表面粗糙度的影响规律。结合气囊抛光的抛光机理对其进行了分析,根据实验结果对工艺参数进行了优化,并进行了综合参数的气囊抛光加工实验,获得了超精密光滑的表面。
For the planar optical components, the polishing removal rate and the surface roughness are taken as the evaluation indexes. The main process parameters of the airbag polishing process are analyzed by orthogonal test, including the compression amount of the polishing tool airbag, the airbag rotational speed, the internal inflation pressure of the airbag, the polishing The effect of liquid concentration on polishing removal efficiency and surface roughness. Combined with the polishing mechanism of the airbag polishing, the process parameters were optimized according to the experimental results, and the airbag polishing processing experiment with the comprehensive parameters was carried out to obtain the ultra-precision and smooth surface.