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一、前言七十年代末期,国际上大型 CZ 单晶炉向采用软轴方向发展。软轴单晶炉以运动平稳,投资较少,维修容易等优点得到广大用户的关注。为了满足我国半导体事业的需要,1980年我们学院决定研制我国第一台软轴(TDR-50型)单晶炉。当时国内没有软籽晶轴炉型,缺乏必要的软轴拉晶工艺实践和软轴单晶炉资料。为了认识软轴拉晶规律,验证 TDR-50型单晶炉的机械和电控方
I. Foreword The late seventies, the international large-scale CZ single crystal furnace to the use of flexible shaft development. Flexible shaft single crystal furnace with smooth movement, less investment, easy maintenance and other advantages of the majority of users attention. In order to meet the needs of China’s semiconductor industry, in 1980 our college decided to develop China’s first flexible shaft (TDR-50 type) single crystal furnace. At that time, there was no domestic soft-core shaft furnace type, the lack of necessary soft-axis pulling crystal process and soft shaft single crystal furnace data. In order to understand the pull-law of flexible shaft, verify the TDR-50 single-crystal furnace mechanical and electrical control side