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采用溶胶凝胶法,通过控制热处理气氛在石英玻璃基片上制备了光电性能优良的CuAlO2薄膜,研究了氧气和氮气对CuAlO2薄膜制备的影响。结果表明,CuAlO2薄膜的制备先后经历了凝胶膜的热分解、无定形薄膜、固相反应、CuAlO2形核与长大4个过程。固相反应阶段前通氧气,能够促进中间产物CuO的生成,之后通氮气可以使中间产物CuO与CuAl2O4发生固相反应生成CuAlO2,最终制备的CuAlO2薄膜结晶状况良好、晶粒较大,表面均匀致密,没有孔洞,电阻率为250Ω.cm,薄膜在700 nm处的透过率为75.5%。
The CuAlO2 thin films with good photoelectric properties were prepared by sol-gel method on the quartz glass substrates by controlling the heat treatment atmosphere. The effects of oxygen and nitrogen on the CuAlO2 thin films were studied. The results show that the preparation of CuAlO2 film has undergone four steps of thermal decomposition, amorphous film, solid phase reaction, nucleation and growth of CuAlO2. Passing oxygen before the solid phase reaction stage can promote the formation of CuO intermediate product. After that, CuO can be produced by solid phase reaction of CuO with CuAl2O4 through nitrogen, and the final prepared CuAlO2 film has good crystallinity, large grain size and even surface density , No holes, a resistivity of 250 Ω · cm and a transmittance of 75.5% at 700 nm.