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用丝网印刷法在氧化铝基底上制备了La0.6Sr0.4MnO3薄膜,通过扫描电镜、能谱仪和四探针测试仪分析了薄膜的显微组织、元素分布及导电性。研究了浆料组成对丝网印刷成膜效果、薄膜与基底的结合力和导电性的影响。结果表明:松油醇作溶剂的浆料比去离子水的成膜效果好,当松油醇加入量为50%～70%(质量分数,下同)时,制成的薄膜均较平整,但存在微裂纹。浆料中加入添加剂乙基纤维素(ethyl cellulose,EC)时,薄膜的微裂纹明显减少,但随EC量增加,薄膜中孔洞增加;实验得出EC的最优加入量为1%。浆料中加入低熔点相熔块粉时可以提高薄膜与基底的结合力,但会显著降低薄膜的导电性。
La0.6Sr0.4MnO3 thin films were prepared on alumina substrate by screen printing method. The microstructure, elemental distribution and conductivity of the films were analyzed by SEM, EDS and four-probe tester. The effects of the composition of the slurry on the film-forming effect of the screen printing, the binding force between the film and the substrate, and the electrical conductivity were studied. The results showed that the filming effect of terpineol as solvent was better than that of deionized water. When the content of terpineol was 50% ~ 70% (mass fraction) But there are micro-cracks. When adding ethyl cellulose (EC) into the slurry, the microcrack of the film was obviously reduced. However, with the increase of EC, the number of pores in the film increased. The optimum addition of EC was 1%. The addition of low melting point frit in the slurry can increase the adhesion of the film to the substrate, but significantly reduce the conductivity of the film.