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本文描述了传输慢波模式的金属-绝缘体-半导体(MIS)共面波导在时域上的特性。为了得出电路的时域响应而提出的理论分析,与测量结果相当一致。所用的电路分析方法适合于确定寄生传输效应,这些效应对于使用在单片微波集成电路中遇到的微型波导(例如肖特基接触共面线和置于金属-绝缘体-半导体基片上的耦合微带线)来说是固有的。
This paper describes the time domain behavior of metal-insulator-semiconductor (MIS) coplanar waveguides transmitting slow-wave modes. The theoretical analysis proposed in order to obtain the time-domain response of the circuit is quite consistent with the measurement results. The circuit analysis methods used are suitable for determining parasitic transmission effects that are of great value for the use of micro-waveguides encountered in monolithic microwave integrated circuits such as Schottky contact coplanar lines and coupled micro-structures on metal-insulator-semiconductor substrates With the line) is inherent.