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北京正负电子对撞机(BEPC)贮存环超高真空系统长约240米,由八个区段组成。 安装后经必要的常规氦质谱检漏和消除这些漏之后,真空度在烘烤前后分别达到10-7帕 和10-8帕。在此基础上做了如下工作。当离子泵系统存在微漏与一般漏(与系统的体 积和泵的抽速比较)时,漏入空气的成分在残气质谱图上有明显的差别。本文解释并利 用了这一现象,对系统进行高灵敏度检漏。
Beijing Electron Positron Collider (BEPC) storage ring ultra-high vacuum system is about 240 meters long and consists of eight sections. After installation, after necessary routine helium mass spectrometry leaks and elimination of these leaks, the vacuum reached 10-7 Pa and 10-8 Pa before and after baking, respectively. On this basis, the following work has been done. When the ion pump system is slightly leaky and the general drain (compared with the system volume and pump pumping speed), the composition of the air leaked in the residual gas chromatogram there are significant differences. This article explains and takes advantage of this phenomenon, the system for high sensitivity leak detection.