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微型节流制冷器(Microminiature J-T Refrigerator,简称MMR)是采用新颖的光刻技术制作成的。七十年代中后期首先由美国斯坦福大学利特尔教授发明和开发研究,八十年代初己有商用产品。由于工艺新颖、尺寸小、振动低,无磁性,有希望比较好的满足光学元件,微电子元件和超导元件冷却的需要,已引起人们广泛的注意和兴趣。本文对其理论、工艺、应用及前景作一综述,其中包括作者本人的一些研究工作。
Microminiature J-T Refrigerator (MMR) is made by using novel photolithography technology. The late seventies first by the United States Stanford University professor Litle invented and developed research, the early 1980s have commercial products. Due to the novel technology, small size, low vibration, non-magnetic, it is hoped that the cooling of optical components, microelectronic components and superconducting components will meet the needs of people. It has attracted a great deal of attention and interest. This article reviews its theories, processes, applications and prospects, including some of the author’s own research.